1. [1] Yoshihiro Asano, Hiroki Yamazaki, and Akira Morinaka, Jpn. J. Appl. Phys., Part 1 22, (1983) 480.
2. [2] Mohammad Abul Kashem, Masaki Matsushita and Shinzo Morita, Jpn. J. Appl. Phys., 43, 3A (2004) L. 355.
3. [3] F. Hache, D. Ricard, and C. Flytzanis, J. Opt. Soc. Am. B3 (1986) 1647.
4. [5] Kazuaki Omura and Shinzo Morita, Jpn. J. Appl. Phys. 43, 5B (2004) L. 689.
5. [6] R. d'Agostino, Ed.; Plasma Deposition, Treatment, and Etching of Polymers, Academic Press, Boston, (1990).