High-Contrast Chemically Amplified Photodefinable Poly(benzoxazole) Using Dissolution Reversers
Author:
Affiliation:
1. Research and Development Center, Hitachi Chemical Co., Ltd.
2. Yamazaki R&D Center, Hitachi Chemical DuPont MicroSystems, Ltd.
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Link
https://www.jstage.jst.go.jp/article/photopolymer/17/2/17_2_247/_pdf
Reference17 articles.
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2. 2. R. Rubner, H. Ahne, E. Kuhn, and G. Kolodziej, Photogr. Sci. Eng., 23, 303 (1979).
3. 3. N. Yoda and H. Hiramoto, J. Macromol. Sci., Chem., A21, 1641 (1984).
4. 4. M. Nunomura and M. Ohe, J. Photopolym. Sci. Technol., 14, 717 (2001).
5. 5. D. N. Khanna and W. H. Mueller, Polym. Eng. Sci., 29, 954 (1989).
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