Author:
Padmanaban Murirathna,Kudo Takanori,Chakrapani Srinivasan,Dioses Alberto,Ng Edward,Neisser Mark,Miyazaki Shinji,Miyamoto Kazma,Akiyama Yasushi,Ishizu Yuko
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference34 articles.
1. 1. M. Padmanaban, Polymer News 28, No.1 (2003) 6-13.
2. 2. T. Schram et al. Symp. VLSI (2008) 44.
3. 3. T. Bailey et al. Proc. SPIE 6924 (2008) 69244F 1-11.
4. 4. T. Hatanaka, S. Kimura, T. Enomoto, Y. Nakajima, Proc. SPIE 5376 (2004) 655.
5. 5. D.J. Guerrero, T. Smith, Proc. SPIE 6153 (2006) 6153O.
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