Polymerizable Olefins Groups in Antimony EUV Photoresists
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Published:2021-06-11
Issue:1
Volume:34
Page:117-121
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ISSN:0914-9244
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Container-title:Journal of Photopolymer Science and Technology
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language:en
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Short-container-title:J. Photopol. Sci. Technol.
Author:
Murphy Michael1, Upadhyay Nitinkumar S.1, Ali Munsaf1, Passarelli James1, Grzeskowiak Jodi1, Weires Maximillian1, Brainard Robert L.1
Affiliation:
1. College of Nanoscale Science and Engineering, SUNY Polytechnic Institute
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference18 articles.
1. 1. R. Brainard, M. Neisser, G. Gallatin, A. Narasimhan, SPIE Press, 2018, Chapter 8, pp. 493. 2. 2. J. Stowers and D. A. Keszler, Microelectron. Eng., 86 (2009) 730. 3. 3. M. Krysak, M. Trikeriotis, E. Schwartz, N. Lafferty, P. Xie, B. Smith, P. Zimmerman, W. Montgomery, E. Giannelis, and C. K. Ober, Proc. SPIE, 7972 (2011) 79721C. 4. 4. M. Sortland, J. Hotalen, R. Del Re, J. Passarelli, M. Murphy, T. S. Kulmala, Y. Ekinci, M. Neisser, D. A. Freedman, and R. L. Brainard, J. Micro. Nanolithogr. MEMS MOEMS, 14 (2015) 043511. 5. 5. M. Wilklow-Marnell, D. Moglia, B. Steimle, B. Cardineau, H. Al-Mashat, P. Nastasi, K. Heard, A. Aslam, R. Kaminski, M. Murphy, R. Del Re, M. Sortland, M. Vockenhuber, Y. Ekinci, R. L. Brainard, D. A. Freedman, J. Micro/Nanolith. MEMS MOEMS, 17 (2018) 043507.
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