Lithography onto Surfaces of Fine-Diameter Pipes Using Rotary Scan-Projection Exposure
Author:
Affiliation:
1. Mechanical Engineering, Tokyo Denki University,
2. Graduate school of Engineering, Tokyo Denki University,
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Link
https://www.jstage.jst.go.jp/article/photopolymer/28/2/28_273/_pdf
Reference15 articles.
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3. 3. D. Lee, H. Hiroshima, Y. Zhang, T. Itoh, R. Maeda, Microelectronic Eng. 88 (2011) 2625-2628.
4. 4. X. Hao, L. Wang, Q.i Wang, F. Gao, Yiping Tang, Y. Ding, B. Lu, Appl. Surface Sci. 257 (2011) 8906-8911.
5. 5. S. C. Tseng, W. Y. Peng, Y. F. Hsieh, P. J. Lee, W. L. Lai, Microelectronic Eng. 87 (2010) 943-946.
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