A Statistical Model Describing Temperature Dependent Gettering of Cu in p-Type Si
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Present Status and Prospect of Si Wafers for Ultra Large Scale Integration
2. The Characteristics of Gettering Ability in Advanced Multi-Chip Packaging Thinned Wafer
3. Development of a Storage Getter Test for Cu Contaminations in Silicon Wafers Based on ToF-SIMS Measurements
4. Low‐Temperature Out‐Diffusion of Cu from Silicon Wafers
5. Molecular Dynamics Study of Fast Diffusion of Cu in Silicon
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