Fabrication of Moisture-Desensitized Freestanding Structures from InP for Photonic-MEMS Applications

Author:

Shah Mithilesh A.,Jisheng Pan,Shanmugan Vicknesh,Akkipeddi Ramam

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Fabrication challenges for indium phosphide microsystems;Journal of Micromechanics and Microengineering;2015-03-17

2. Additive Processes for Semiconductors and Dielectric Materials;MEMS Reference Shelf;2011

3. Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP;Journal of Micro/Nanolithography, MEMS, and MOEMS;2010-04-01

4. Novel InP-based optical MEMS device;Journal of Micro/Nanolithography, MEMS, and MOEMS;2008-07-01

5. Nanoindentation techniques in the measurement of mechanical properties of InP-based free-standing MEMS structures;Journal of Micromechanics and Microengineering;2008-01-04

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