Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Effects of dopant (Al, Ga, and In) on the characteristics of ZnO thin films prepared by RF magnetron sputtering system
2. Influence of Ar/O2 ratio on the properties of transparent conductive ZnO:Ga films prepared by DC reactive magnetron sputtering
3. The growth of transparent conducting ZnO films by pulsed laser ablation
4. Performance of InGaN/GaN MQW LEDs Using Ga-Doped ZnO TCLs Prepared by ALD
5. Widely Tunable MEMS-Based Fabry–Perot Filter
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