Affiliation:
1. Applied Materials, Incorporated, Santa Clara, California 95051
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. The effect of orientation deviation on pattern distortion in epitaxial buried layer on p-type 〈100〉 silicon substrate;Journal of Crystal Growth;1998-07
2. References;Thin Films by Chemical Vapour Deposition;1990
3. Silicon Epitaxy;Microelectronic Materials and Processes;1989
4. SILICON VAPOR-PHASE EPITAXY;Epitaxial Silicon Technology;1986