The Effects of Dose and Target Temperature on Low Energy SIMOX Layers-Reference-Cited by-同舟云学术

The Effects of Dose and Target Temperature on Low Energy SIMOX Layers

Published:1993-06-01 Issue:6 Volume:140 Page:1780-1786
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Li Y.¹²³,Kilner J. A.¹²³,Chater R. J.¹²³,Hemment P. L. F.¹²³,Nejim A.¹²³,Robinson A. K.¹²³,Reeson K. J.¹²³,Marsh C. D.¹²³,Booker G. R.¹²³

Affiliation:

1. Department of Materials, Imperial College of Science, Technology, and Medicine, London SW7 2BP, England

2. Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey GU2 5XH, England

3. Department of Materials, University of Oxford, Oxford OX1 3PH, England

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2221642/pdf

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