Effect of Composition on Structural and Electrical Properties of Amorphous Ta-W-Si-C Metal Thin Films-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Effect of Composition on Structural and Electrical Properties of Amorphous Ta-W-Si-C Metal Thin Films

Published:2013-07-23 Issue:10 Volume:2 Page:P86-P88
ISSN:2162-8742
Container-title:ECS Solid State Letters
language:en
Short-container-title:ECS Solid State Letters

Author:

Ouyang J.,Wongpiya R.,Grubbs M. E.,Deal M. D.,Clemens B. M.,Nishi Y.

Publisher

The Electrochemical Society

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. TaWSi amorphous metal thin films: composition tuning to improve thermal stability;MRS Communications;2017-09

2. Ta-based amorphous metal thin films;Journal of Alloys and Compounds;2015-11

3. Amorphorized tantalum-nickel binary films for metal gate applications;Applied Physics Letters;2015-04-13

4. Structural and electrical characterization of CoTiN metal gates;Journal of Applied Physics;2015-02-21

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP