(Invited) How to Integrate MEMS on Foundry-Fabricated CMOS Backplanes
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Published:2017-08-01
Issue:4
Volume:80
Page:147-155
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ISSN:1938-6737
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Container-title:ECS Transactions
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language:en
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Short-container-title:ECS Trans.
Author:
Schulze Matthias,Hohle Christoph,Friedrichs Martin
Publisher
The Electrochemical Society