A Review of Microelectronic Manufacturing Applications Using DMSO-Based Chemistries

Abstract

Dimethyl Sulfoxide (DMSO) is a proven solvent used in microelectronic manufacturing. These processes include resist stripping applications in lithography. DMSO exhibits a unique high polarity as defined by a high dielectric constant which aids in its dissolution character for both polymers and inorganic salts. This polarity allows formulating with additives that aid in stripping polymers processed with inorganic species. DMSO is stable with limited hydrolysis when exposed to aggressive reagents. These qualities help to support challenging cleans applications where cured polymers are stripped from sensitive metal features such as gate-level high-dose implanted resist and in solder bumping. The safety classification of DMSO as non-regulated is in accordance with the US EPA and the European Union, a condition that is consistent with the needs of the ITRS challenge for next generation products used in the fab.