Affiliation:
1. Sherman Fairchild Laboratory, Lehigh University, Bethlehem, Pennsylvania 18015
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
24 articles.
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2. Halogens;Computational Microelectronics;2004
3. THERMAL OXIDATION OF SILICON AND Si-SiO2 INTERFACE MORPHOLOGY, STRUCTURE AND LOCALIZED STATES;Handbook of Surfaces and Interfaces of Materials;2001
4. Effect of Cl in Gate Oxidation;MRS Proceedings;1997
5. Effect of Cl in Gate Oxidation;MRS Proceedings;1997