Chemical Vapor Cleaning of 6H‐SiC Surfaces-Reference-Cited by-同舟云学术

Chemical Vapor Cleaning of 6H‐SiC Surfaces

Published:1999-09-01 Issue:9 Volume:146 Page:3448-3454
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

King Sean W.¹,Kern R. Scott¹,Benjamin Mark C.²,Barnak John P.¹,Nemanich Robert J.²,Davis Robert F.¹

Affiliation:

1. Department of Materials Science and Engineering

2. Department of Physics, North Carolina State University, Raleigh, North Carolina 27695, United States of America

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.1392494/pdf

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