Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
29 articles.
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1. Thin Film Deposition;Fundamentals of Semiconductor Processing Technology;1995
2. Growth kinetics and reaction mechanism of silicon chemical vapour deposition from silane;Thin Solid Films;1993-02
3. Delta doping in silicon;Critical Reviews in Solid State and Materials Sciences;1993-01
4. Residual impurities originating from AsH3 in GS-MBE grown GaAs;Journal of Crystal Growth;1991-05
5. References;Thin Films by Chemical Vapour Deposition;1990