Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films

Abstract

We have investigated the novel optical behavior of Ag metal deposited via plasma enhanced atomic layer deposition (PEALD). This material exhibits unexpected plasmonic properties and the plasmonic enhancement is dependent on the unique microstructure of the Ag film. Electromagnetic field simulations indicate that this optical behavior is due to air gaps that are an inherent property of the mosaic-like microstructure of the PEALD-grown Ag film. We have also investigated the effect of modifying these air gaps, and the development of flexible plasmonic materials, using this unique metamaterial.