Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
24 articles.
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1. Nonequilibrium Atmospheric Plasma Deposition;Journal of Thermal Spray Technology;2011-03-24
2. CVD (Chemical Vapor Deposition);digital Encyclopedia of Applied Physics;2003-04-15
3. Thin Film Deposition;Fundamentals of Semiconductor Processing Technology;1995
4. Si Epitaxy below400°Cfrom Fluorinated PrecursorsSiFnHm(n+m≤3) under In Situ Observation with Ellipsometry;Japanese Journal of Applied Physics;1994-02-15
5. References;Thin Films by Chemical Vapour Deposition;1990