Author:
Beckhoff Burkhard,Nutsch Andreas,Altmann Roswitha,Borionetti Gabriella,Pello C.,Polignano Maria Luisa,Codegoni Davide,Grasso Salvatore,Cazzini Elena,Bersani Massimo,Gennaro Salvatore,Kolbe Michael,Mueller Matthias,Kregsamer Peter,Posch Florian
Abstract
The European Integrated Activity of Excellence and Networking for Nano- and Micro-Electronics Analysis (ANNA), www.ANNA-i3.net, addresses the development and assessment of new methodologies and metrologies for the detection of low concentration inorganic contaminants on and in silicon as well as for novel materials. The comparison of various analytical techniques available to the participating partners is important for assessment of both instrumentation and quantification reliability.
Publisher
The Electrochemical Society
Cited by
2 articles.
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