Equilibrium Deposition Rate of Silicon in Si-I2 and Si-H2-Cl2 Systems

Author:

Studenikin Pavel A.ORCID,Nova Samuel

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Allendorf M. , From Bunsen to VLSI, 150 Years of Growth in Chemical Vapor Deposition Technology, The Electrochemical Society Interface, Spring 1998, pp. 36.

2. Kopecek R. , SoG-Si feedstock: status, problems and solutions, Presentation, University of Konstanz, Faculty of Sciences, Photovoltaic Division, 2006, 24 slides.

3. Photovoltaic materials and crystal growth research and development in the Gigawatt era

4. High-Purity Silicon from an Iodide Process Pilot Plant

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