1. Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, Sendai, Japan
2. Samsung Electronics Corporation, Micro‐contamination Control Engineering Project, Manufacturing Technology Center, Corp., Yongin‐City, Kyunggi‐Do, Korea
3. Kurita Water Industries Limited, Research and Development Division, Corporate Research and Development Center, 7-1, Atsugi‐City, Kanagawa, Japan
4. New Industry Creation Hatchery Center, Tohoku University, Sendai, Japan