Author:
Saga Koichiro,Hattori Takeshi
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. T. Hattori , inCharacterization and Metrology for ULSI Technology2000, D. G. Seiler , A. C. Diebold , T. J. Shaffner , R. McDonald , W. M. Bullis , P. J. Smith , and E. M. Secula , Editors, AIP Conference Proceedings, 550, pp. 275-284, American Institute of Physics, New York (2001).
2. Hydrocarbon reaction with HF‐cleaned Si(100) and effects on metal‐oxide‐semiconductor device quality
3. Influence of Surface Organic Contamination on the Incubation Time in Low‐Pressure Chemical Vapor Deposition
4. Influence of silicon-wafer loading ambients in an oxidation furnace on the gate oxide degradation due to organic contamination
5. Identification and Removal of Trace Organic Contamination on Silicon Wafers Stared in Plastic Boxes
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