Measurement of Low Concentration Nitrogen in Czochralski Silicon by Infrared Absorption Spectroscopy
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Published:2018-07-23
Issue:10
Volume:86
Page:87-94
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ISSN:1938-6737
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Container-title:ECS Transactions
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language:en
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Short-container-title:ECS Trans.
Author:
Inoue Naohisa,Okuda Shuichi,Kawamata Shuichi
Publisher
The Electrochemical Society