Reaction of 1,1,1,5,5,5‐Hexafluoro‐2,4‐pentanedione (H+hfac) with CuO , Cu2 O , and Cu Films
Author:
Affiliation:
1. Department of Chemical Engineering, Lehigh University, Bethlehem, Pennsylvania 18015
2. Air Products and Chemicals, Incorporated, Allentown, Pennsylvania 18195
3. Texas Instruments, Dallas, Texas 75265
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Link
https://iopscience.iop.org/article/10.1149/1.2048567/pdf
Cited by 44 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Limiting or Continuous Thermal Etching of First Row Transition Metal Oxides Using Acetylacetone and Ozone;Chemistry of Materials;2024-08-02
2. Thermal Atomic Layer Etching of Molybdenum Using Sequential Oxidation and Deoxychlorination Reactions;Chemistry of Materials;2024-01-29
3. Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures;Applied Surface Science;2023-11
4. Spontaneous etching of B2O3 by HF gas studied using infrared spectroscopy, mass spectrometry, and density functional theory;Journal of Vacuum Science & Technology A;2022-03
5. Oxygen-assisted platinum etching in supercritical carbon dioxide fluids using hexafluoroacetylacetone;Japanese Journal of Applied Physics;2018-06-14
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3