How to Make Optimized Arrays of Si Wires Suitable as Superior Anode for Li-Ion Batteries

Abstract

The fabrication process to produce Si wires with superior structural properties for application in Li-ion batteries is described. The process is based on the electrochemical etching of pores in Si, followed by a chemical over-etching step. The wires obtained have a quadratic cross section of around 1.5 x 1.5 micron and are organized in an array stabilized by two in-situ-created supports. An electrodeposited Cu film on the array is used as current collector. The method described is a production-near process with a potential for low costs and high yield.