Room Temperature Photoluminescence and Raman Characterization of Interface Characteristics of SiN/SiO2/Si Prepared under Various Deposition Techniques and Conditions

Author:

Yoo Woo Sik,Kim Byoung Gyu,Jin Seung Woo,Ishigaki Toshikazu,Kang Kitaek

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference27 articles.

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