Fabrication and Characterization of an Impedance Micro-Bridge for Lab-on-a-Chip
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Published:2010-10-01
Issue:1
Volume:31
Page:155-163
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ISSN:1938-5862
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Container-title:ECS Transactions
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language:
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Short-container-title:ECS Trans.
Author:
Bento Ribeiro Luiz E.,Piazzetta Maria H.,Gobbi Angelo L.,Costa Juvenil S.,Fracassi da Silva José A.,Fruett Fabiano
Abstract
This paper describes a fabrication technique of planar impedance micro-bridge microstructures with electrodes gap of 10 μm, 15 μm and 20 μm on glass substrate. The microscope inspection showed that the structures well reproduced the design of the masks. The impedances were measured and the results shown a good repeatability with a standard deviation of 11.4%. Furthermore, microchannels fabricated in PDMS were aligned with the micro-bridges. Using O2 plasma we obtained irreversible adhesion between PDMS and glass as between the PDMS and the electrodes. This fabrication technique, which merges microelectronic sensors with fluidic devices, is very suitable for Lab-on-a-Chip applications.
Publisher
The Electrochemical Society
Cited by
1 articles.
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