Author:
Thagella Swetha,Sikder Arun K.,Kumar Ashok
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference41 articles.
1. J. M. Steigerwald, S. P. Murarka, and R. J. Gutmann,Chemical Mechanical Planarization of Microelectronical Materials, John Wiley & Sons, Inc., New York (1997).
2. T. Tucker, in Plenary Talk, American Vacuum Society Meeting, San Jose, CA, Oct 2001.
3. S. R. Runnels and L. M. Eymann, Sematech Report (1993).
Cited by
17 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献