Chemical Vapor Deposition Reactor Design Using Small‐Scale Diagnostic Experiments Combined with Computational Fluid Dynamics Simulations-Reference-Cited by-同舟云学术

Chemical Vapor Deposition Reactor Design Using Small‐Scale Diagnostic Experiments Combined with Computational Fluid Dynamics Simulations

Published:1999-05-01 Issue:5 Volume:146 Page:1780-1788
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Chae Y. K.¹,Egashira Y.²,Shimogaki Y.¹,Sugawara K.³,Komiyama H.¹

Affiliation:

1. Department of Chemical System Engineering, University of Tokyo, Tokyo 113-8656, Japan

2. Division of Chemical Engineering, Graduate School of Engineering Science, Osaka University, Osaka, Japan

3. Department of Computer Science, College of Engineering, Nihon University, Fukushima‐ken, Japan

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.1391843/pdf

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