(Invited) Template Assisted Synthesis of Porous Metal Oxide and Metal Nanostructures by ALD

Abstract

Porous materials are widely used in various applications since they can provide tremendous active surface area, e.g. in catalysis, energy storage, absorption and detection of toxic materials, etc. In recent years, due to its superior advantage in conformally coating porous materials, the ALD technique attracted great attention and has been used to synthesize nanomaterials with porous features. Templates are indispensable for these ALD-based approaches, since ALD can only deposit 2D thin film instead of 3D porous structures. In this paper, we will give a thorough review on the existing literature reported on template assisted and ALD based synthesises of porous nanomaterials of metal oxides and metals. The dis/advantages of each kind of template will be surveyed.