(Invited) Active Magnetic Micro and Nano Electro-Mechnical Systems (MNEMS)

Abstract

For active micro and nano electromechanical systems (MEMS/NEMS), electromagnetic actuators excel in robustness, are capable of substantial displacements, and of exerting rather large forces. This paper presents an overview over interesting micro and nano magnetic actuation activities in the range of optical devices, fluidic pump systems, biomedical applications, computer and communication technology devices, as well as X and X-Y actuation systems. Particular emphasis is put on research conducted in this field at the Leibniz Universitaet Hannover in Germany.