Metal Fume‐Free Welding Technology for Advanced Semiconductor Grade Gas Delivery System-Reference-Cited by-同舟云学术

Metal Fume‐Free Welding Technology for Advanced Semiconductor Grade Gas Delivery System

Published:1995-07-01 Issue:7 Volume:142 Page:2362-2372
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Ohmi Tadahiro¹²,Miyoshi Shinji¹²,Shirai Yasuyuki¹²,Kojima Tsutomu¹²,Mizuguchi Yasumitsu¹²

Affiliation:

1. Department of Electronics, Faculty of Engineering, Tohoku University, Sendai 980, Japan

2. Advanced Gas Technology Center, Osaka Sanso Kogyo Limited, Higashi‐Matsuyama, Saitama 355, Japan

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2044301/pdf

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