Author:
Stach Joseph,Turley Alfred
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
19 articles.
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1. Kinetics of borosilicate glass deposition;Journal of Materials Research;2004-03
2. Dopants;Computational Microelectronics;2004
3. Distribution of Residual Stresses in Boron Doped p+ Silicon Films;Journal of The Electrochemical Society;1996-10-01
4. Microphysical investigations on mechanical structures realized in p/sup +/ silicon;Journal of Microelectromechanical Systems;1995
5. References;Thin Films by Chemical Vapour Deposition;1990