Author:
Yoshida M.,Gösele U.,Morooka M.,Tanaka S.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference6 articles.
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3. Simulation of Phosphorus Diffusion Profiles with Different Phosphorus Surface Concentration at the Same Diffusion Temperature in Silicon
4. The Enhanced Diffusion of Arsenic and Phosphorus in Silicon by Thermal Oxidation
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2 articles.
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