Structural and Optical Properties of Porous SiGe/Si Multilayer Films
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Published:2011-03-21
Issue:1
Volume:34
Page:1145-1149
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ISSN:1938-5862
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Container-title:ECS Transactions
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language:
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Short-container-title:ECS Trans.
Author:
Zhou Bi,Li X. M.,Pan Shu W.,Chen Song Y.,Li Cheng
Abstract
The structural and optical properties of heterogeneous SiGe/Si multilayered films, which was prepared through a combination of ultrahigh vacuum chemical vapor deposition (UHVCVD) and electrochemical anodization (ECA), have been investigated. The structural parameters of multilayer films before ECA were determined by double crystal X-ray diffraction and the simulation. The visible luminescence spectra with multiple emission peaks been detected in the temperature range from 10 K to room temperature. The origins of PL with multiple peaks were discussed in detail.
Publisher
The Electrochemical Society