The Effect of Wall Heating in Horizontal Organometallic Vapor Phase Epitaxial Reactors-Reference-Cited by-同舟云学术

The Effect of Wall Heating in Horizontal Organometallic Vapor Phase Epitaxial Reactors

Published:1991-05-01 Issue:5 Volume:138 Page:1452-1455
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Chinoy Percy B.¹²³,Kaminski Deborah A.¹²³,Ghandhi Sorab K.¹²³

Affiliation:

1. Department of Chemical Engineering, Rensselaer Polytechnic Institute, Troy, New York 12180

2. Department of Mechanical Engineering, Aeronautical Engineering and Mechanics, Rensselaer Polytechnic Institute, Troy, New York 12180

3. Department of Electrical, Computer and Systems Engineering, Rensselaer Polytechnic Institute, Troy, New York 12180

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2085805/pdf

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