Fabrication of Nanoscale PtO[sub x]∕PZT∕PtO[sub x] Capacitors by E-beam Lithography and Plasma Etching with Photoresist Mask-Reference-Cited by-同舟云学术

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Fabrication of Nanoscale PtO[sub x]∕PZT∕PtO[sub x] Capacitors by E-beam Lithography and Plasma Etching with Photoresist Mask

Published:2006 Issue:3 Volume:9 Page:C51
ISSN:1099-0062
Container-title:Electrochemical and Solid-State Letters
language:en
Short-container-title:Electrochem. Solid-State Lett.

Author:

Huang Chun-Kai,Chen Yen-Hua,Liang Yuan-Chang,Wu Tai-Bor,Chen Hsuen-Li,Chao Wen-Chi

Publisher

The Electrochemical Society

Subject

Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering

Reference16 articles.

1. Ferroelectric Memories

2. Strontium titanate thin films by rapid thermal processing

3. Demonstration of scaled (⩾0.12 μm2) Pb(Zr,Ti)O3 capacitors on W plugs with Al interconnect

4. Low-Temperature Capacitor-Over-Interconnect (COI) Modular FeRAM for SOC Application

5. Patterning and switching of nanosize ferroelectric memory cells

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