(Invited) The Dynamics of Nickelidation for Self-Aligned Contacts to InGaAs Channels
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Published:2017-08-16
Issue:1
Volume:80
Page:53-69
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ISSN:1938-6737
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Container-title:ECS Transactions
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language:en
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Short-container-title:ECS Trans.
Author:
Chen RenjieORCID,
Dai Xing,
Jungjohann Katherine L,
Mook William Moyer,
Nogan John,
Soci Cesare,
Dayeh Shadi
Publisher
The Electrochemical Society