Author:
Edon V.,Li Z.,Hugon M.-C.,Krug C.,Bastos K. P.,Miotti L.,Baumvol I. J. R.,Cardinaud C.,Durand O.,Eypert C.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Fabrication of the low-k films with tunable k value as spacers in advanced CMOS technology;Journal of Vacuum Science & Technology A;2024-02-29
2. Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-03