Green Electrodeposition Trends in Semiconductor Industry
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Published:2013-10-06
Issue:19
Volume:53
Page:1-13
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ISSN:1938-5862
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Container-title:ECS Transactions
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language:
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Short-container-title:ECS Trans.
Author:
Shalyt Eugene,Pavlov Michael,Bai Chuannan
Abstract
Electrodeposition in all industries switches to less hazardous components in compliance to regulations. Unique trend of semiconductor industry includes emphasize on process control w.hich enables extension of electrolyte life time and decrease of bleed and feed ratio.
Publisher
The Electrochemical Society