Affiliation:
1. Paul Scherrer Institute, c/o Laboratories RCA, Badenerstrasse 569, 8048 Zurich, Switzerland
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
8 articles.
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1. Dry Etching of Electronic Oxides, Polymers, and Semiconductors;Plasma Processes and Polymers;2005-01-12
2. Wet and Dry Etching Materials;Handbook of Chemicals and Gases for the Semiconductor Industry;2002-07-15
3. Mass Spectrometric Characterization of Plasma Etching Processes;Handbook of Advanced Plasma Processing Techniques;2000
4. Plasma Chemistry;Wiley Encyclopedia of Electrical and Electronics Engineering;1999-12-27
5. Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing;Computers & Operations Research;1996-06