CMOS Technology Toward Green

Abstract

Though the CMOS scaling itself is a "green" concept, the "Moore's law" continues to drive CMOS toward more complicate processes, e.g. strain engineering, high-k and metal gate stack, SOI and 3D transistors, ... etc. New technologies of CMOS logic, memory, SOC and SIP are reviewed not only for continuous success of Moore's law but also "greener" CMOS manufacturing