Silicon Corrosion in Neutral Media: The Influence of Confined Geometries and Crevice Corrosion in Simulated Physiological Solutions

Author:

Ilic EmilijaORCID,Pardo Ainhoa,Hauert Roland,Schmutz Patrik,Mischler Stefano

Funder

Schweizerische Nationalfonds zur Förderung der Wissenschaftlichen Forschung

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

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5. Corrosion of silicon integrated circuits and lifetime predictions in implantable electronic devices

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