X-ray and Raman Characterization of Strained SiGe Layers Treated by Stain Etching
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Published:2013-03-15
Issue:9
Volume:50
Page:465-468
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ISSN:1938-6737
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Container-title:ECS Transactions
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language:en
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Short-container-title:ECS Transactions
Author:
Zhou W.,Liang R.,Yan L.
Publisher
The Electrochemical Society