(Invited) Techniques for the Dry Transfer of Epitaxial Graphene onto Arbitrary Substrates

Abstract

Graphene can be formed via a variety of methods, each providing various benefits. Epitaxial graphene (EG) grown on the carbon-face of SiC has been shown to exhibit high carrier mobilities, in comparison to other growth techniques, while remaining amenable to wafer-scale graphene fabrication. Therefore, the transfer of large area (>mm2) graphene films to substrates amenable for specific applications is desirable. We demonstrate the dry transfer of EG from the C-face of 4H-SiC onto SiO2, GaN and Al2O3 substrates via two approaches using either 1) thermal release tape, 2) a PMMA/thermal release tape bilayer or 3) a spin-on, chemically-etchable dielectric. We will report on the impact that these transfer processes has upon the electrical properties of the transferred EG films.