Author:
Armini S.,Whelan C. M.,Moinpour M.,Maex K.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference39 articles.
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3. Composite Polymer-Core Silica-Shell Abrasive Particles during Oxide CMP
4. The Role of Glycine in the Chemical Mechanical Planarization of Copper
5. Chemical Mechanical Planarization of Copper: Role of Oxidants and Inhibitors
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39 articles.
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