Ultra-Thin SiO2/Si Interface Quality In-Line Monitoring Using Multiwavelength Room Temperature Photoluminescence and Raman Spectroscopy

Author:

Yoo Woo Sik,Kim Byoung Gyu,Jin Seung Woo,Ishigaki Toshikazu,Kang Kitaek

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference29 articles.

1. Schroder D. K. , in Semiconductor Material And Device Characterization, 3rd Eds., Chapers 6, 7, 9 and 10, Wiley Interscience, New Jersey (2006).

2. Nicollian E. H. Brews J. R. , in MOS (Metal Oxide Semiconductor) Physics and Technology, Chapters 8, 10 and 11, John Wiley & Sons, New York (1982).

3. Chang C. Y. Sze S. M. , in ULSI Technology, Chapter 12, McGraw-Hill, New York (1996).

4. Uniaxial-process-induced strained-Si: extending the CMOS roadmap

5. Ultra-large-scale integration device scaling and reliability

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