Author:
Niskanen Antti,Rahtu Antti,Sajavaara Timo,Arstila Kai,Ritala Mikko,Leskelä Markku
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. Copper Metallization for High Performance Silicon Technology
2. Characterization of additive systems for damascene Cu electroplating by the superfilling profile monitor
3. Silicon Roadmap, http://public.itrs.net/Files/2002Update/2001ITRS/Home.htm and http://public.itrs.net/Files/2002Update/2002Update.pdf
4. M. Ritala and M. Leskelä, inHandbook of Thin Film Materials, H. S. Nawa, Editor, p. 103, Academic, San Diego, CA (2001).
5. Atomic-layer deposition of wear-resistant coatings for microelectromechanical devices
Cited by
64 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献