Author:
Thackeray James W.,Aqad Emad,Kang Su Jin,Spear-Alfonso Kathleen
Publisher
The Electrochemical Society
Cited by
2 articles.
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1. Understanding the onset of EUV resist chemical stochastics;Japanese Journal of Applied Physics;2023-06-01
2. Overview of materials and processes for lithography;Materials and Processes for Next Generation Lithography;2016