Parameter Sensitivity Analysis Applied to Modeling Transient Enhanced Diffusion and Activation of Boron in Silicon-Reference-Cited by-同舟云学术

Parameter Sensitivity Analysis Applied to Modeling Transient Enhanced Diffusion and Activation of Boron in Silicon

Published:2003 Issue:12 Volume:150 Page:G758
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Gunawan R.,Jung M. Y. L.,Braatz R. D.,Seebauer E. G.

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference40 articles.

1. See, for example, theInternational Technology Roadmap for Semiconductors, http://public.itrs.net/Files/2001ITRS/Home.htm

2. Rapid Thermal Processing: Science and Technology, R. B. Fair, Editor, Academic Press, Boston (1993).

3. See, for example, Mater. Res. Soc. Symp. Proc., 568 (1999);

4. Mater. Res. Soc. Symp. Proc., 610 (2000).

5. M. Y. L. Jung, R. Gunawan, R. D. Braatz, and E. G. Seebauer,AIChE J., Submitted.

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mechanism of creation and destruction of oxygen interstitial atoms by nonpolar zinc oxide(101̄0) surfaces;Physical Chemistry Chemical Physics;2021

2. Kinetic Control of Oxygen Interstitial Interaction with TiO2(110) via the Surface Fermi Energy;Langmuir;2020-10-16

3. Elucidating the reaction and diffusion network of oxygen interstitial atoms near a TiO2(1 1 0) surface;Applied Surface Science;2019-03

4. Elucidating Cellular Population Dynamics by Molecular Density Function Perturbations;Processes;2018-01-23

5. Microkinetic model for reaction and diffusion of titanium interstitial atoms near a TiO2(110) surface;Physical Chemistry Chemical Physics;2018